Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Morris Gregory Colburn
 2. Date of Event Requiring Statement (Month/Day/Year)
02/24/2010		 3. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG]
(Last)
(First)
(Middle)
22330 WYBENGA LANE		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Vice President, GM, Field Ops.
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

NUEVO, CA 92567		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 157,711
D
 
Common Stock 16,822
I
By 401(k) Plan

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Employee Stock Option (right to buy)   (1) 07/11/2010 Common Stock 300 $ 11 D  
Employee Stock Option (right to buy)   (1) 10/15/2012 Common Stock 23,914 $ 5.9 D  
Employee Stock Option (right to buy)   (1) 10/22/2013 Common Stock 3,000 $ 11.96 D  
Employee Stock Option (right to buy)   (1) 10/22/2013 Common Stock 25,000 $ 11.96 D  
Employee Stock Option (right to buy)   (1) 10/15/2014 Common Stock 27,500 $ 8.37 D  
Employee Stock Option (right to buy)   (1) 10/15/2014 Common Stock 2,000 $ 8.37 D  
Employee Stock Option (right to buy)   (2) 02/21/2015 Common Stock 22,120 $ 7.07 D  
Employee Stock Option (right to buy)   (3) 12/16/2015 Common Stock 14,000 $ 2.1 D  
Employee Stock Option (right to buy)   (4) 02/19/2016 Common Stock 90,000 $ 1.13 D  
Employee Stock Option (right to buy)   (5) 02/19/2017 Common Stock 40,790 $ 5.4 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Morris Gregory Colburn
22330 WYBENGA LANE
NUEVO, CA 92567		       Vice President, GM, Field Ops.  

Signatures

Peter W. Walcott, Attorney-in-Fact for Gregory C. Morris 03/01/2010
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) This option is fully vested.
(2) This option is exercisable in three equal annual installments. The first installment became exercisable on 2/21/2009, the second installment became exercisable on 2/21/2010 and the last installment becomes exercisable on 2/21/2011.
(3) This option is exercisable in four equal annual installments. The first installment became exercisable on 12/16/2009 and the next three installments become exercisable on 12/16/2010, 12/16/2011 and 12/16/2012.
(4) This option is exercisable in three equal annual installments. The first installment became exercisable on 2/19/2010 and the next two installments become exercisable on 2/19/2011 and 2/19/2012.
(5) This option is exercisable in three equal installments. The first installment will become exercisable on 2/19/2011 and the next two installments become exercisable on 2/19/2012 and 2/19/2013.

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