UNITED STATES
                  SECURITIES AND EXCHANGE COMMISSION
                        Washington, D.C. 20549


                             SCHEDULE 13G

               Under the Securities Exchange Act of 1934


                          (Amendment No. 5)*


                        ASM Lithography Holding NV
                             (Name of Issuer)

                             Ordinary Shares
                      (Title of Class of Securities)

                                001905934
                              (CUSIP Number)

                            December 31, 2002
         (Date of Event Which Requires Filing of this Statement)


Check the appropriate box to designate the rule pursuant to which this
Schedule is filed:
[ ] Rule 13d-1(b)
[X] Rule 13d-1(c)
[ ] Rule 13d-1(d)


*The remainder of this cover page shall be filled out for a reporting
person's initial filing on this form with respect to the subject class
of securities, and for any subsequent amendment containing information
which would alter the disclosures provided in a prior cover page.

The information required in the remainder of this cover page shall not
be deemed to be "filed" for the purpose of Section 18 of the Securities
Exchange Act of 1934 ("Act") or otherwise subject to the liabilities of
that section of the Act but shall be subject to all other provisions of
the Act (however, see the Notes).



















CUSIP: 001905934                                                Page 1 of 7


 1   NAMES OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)
     Capital Group International, Inc.
     95-4154357

 2   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE
     INSTRUCTIONS)                                                 (a)

                                                                    (b)

 3   SEC USE ONLY



 4   CITIZENSHIP OR PLACE OF ORGANIZATION

     California

             5   SOLE VOTING POWER

                  50,734,890


             6   SHARED VOTING POWER
 NUMBER OF

   SHARES
                  NONE
BENEFICIALL

 Y OWNED BY
             7   SOLE DISPOSITIVE POWER
    EACH

 REPORTING
                  56,491,230
   PERSON
   WITH:
             8   SHARED DISPOSITIVE POWER

                  NONE

 9   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     56,491,230     Beneficial ownership disclaimed pursuant to Rule 13d-4

 10  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
     (SEE INSTRUCTIONS)


 11  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9

     11.7%

 12  TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)

     HC






CUSIP: 001905934                                                Page 2 of 7





 1   NAMES OF REPORTING PERSONS
     I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)
     Capital Guardian Trust Company
     95-2553868

 2   CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (SEE
     INSTRUCTIONS)                                                 (a)

                                                                    (b)

 3   SEC USE ONLY



 4   CITIZENSHIP OR PLACE OF ORGANIZATION

     California

             5   SOLE VOTING POWER

                  20,229,550


             6   SHARED VOTING POWER
 NUMBER OF

   SHARES
                  NONE
BENEFICIALL

 Y OWNED BY
             7   SOLE DISPOSITIVE POWER
    EACH

 REPORTING
                  25,982,940
   PERSON
   WITH:
             8   SHARED DISPOSITIVE POWER

                  NONE

 9   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     25,982,940     Beneficial ownership disclaimed pursuant to Rule 13d-4

 10  CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES
     (SEE INSTRUCTIONS)


 11  PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9

     5.4%

 12  TYPE OF REPORTING PERSON (SEE INSTRUCTIONS)

     CO






CUSIP: 001905934                                                Page 3 of 7




                  SECURITIES AND EXCHANGE COMMISSION
                         Washington, DC 20549

                             Schedule 13G
               Under the Securities Exchange Act of 1934


Amendment No. 5

Item 1(a)     Name of Issuer:
       ASM Lithography Holding NV

Item 1(b)     Address of Issuer's Principal Executive Offices:
       1110 De Run
       5503 LA Veldhoven
       The  Netherlands

Item 2(a)     Name of Person(s) Filing:
       Capital Group International, Inc. and Capital Guardian Trust
       Company

Item 2(b)     Address of Principal Business Office or, if none,
       Residence:
       11100 Santa Monica Blvd.
       Los Angeles, CA  90025

Item 2(c)     Citizenship:   N/A

Item 2(d)     Title of Class of Securities:
       Ordinary Shares

Item 2(e)     CUSIP Number.:
       001905934

Item 3     If this statement is filed pursuant to sections 240.13d-1(b)
       or 240.13d-2(b) or (c), check whether the person filing is a:
       N/A

Item 4     Ownership

       Provide the following information regarding the aggregate
       number and percentage of the class of securities of the issuer
       identified in Item 1.

       See pages 2 and 3

       (a)    Amount beneficially owned:
       (b)    Percent of class:
       (c)    Number of shares as to which the person has:
       (i)    Sole power to vote or to direct the vote:
       (ii)   Shared power to vote or to direct the vote:
       (iii)  Sole power to dispose or to direct the disposition of:
       (iv)   Shared power to dispose or to direct the disposition of:





CUSIP: 001905934                                                Page 4 of 7





       Capital Group International, Inc. ("CGII") is the parent
       holding company of a group of investment management companies
       that hold investment power and, in some cases, voting power
       over the securities reported in this Schedule 13G.  The
       investment management companies, which include a "bank" as
       defined in Section 3(a)(6) of the Securities Exchange Act of
       1934 (the "Act") and several investment advisers registered
       under Section 203 of the Investment Advisers Act of 1940,
       provide investment advisory and management services for their
       respective clients which include registered investment
       companies and institutional accounts.  CGII does not have
       investment power or voting power over any of the securities
       reported herein.  However, by virtue of Rule 13d-3 under the
       Act, CGII may be deemed to "benefically own" 56,491,230 shares
       or 11.7% of the 482,237,417 shares of  Ordinary Shares believed
       to be outstanding.

       Capital Guardian Trust Company, a bank as defined in Section
       3(a)(6) of the Act is deemed to be the beneficial owner of
       25,982,940 shares or 5.4% of the 482,237,417 shares of Ordinary
       Shares believed to be outstanding as a result of its serving as
       the investment manager of various institutional accounts.

       Shares reported by Capital Group International, Inc.   include
       2,950 shares resulting from the assumed conversion of $110,000
       principal amount of the 4.25% Convertible due 11/30/2004; and
       53,590 shares from the assumed conversion of $1,000,000
       principal amount of the 5.75% Convertible due 10/15/2006.

Item 5     Ownership of Five Percent or Less of a Class.  If this
       statement is being filed to report the fact that as of the date
       hereof the reporting person has ceased to be the beneficial
       owner of more than five percent of the class of securities,
       check the following: [ ]

Item 6     Ownership of More than Five Percent on Behalf of Another
       Person: N/A

Item 7     Identification and Classification of the Subsidiary Which
       Acquired the Security Being Reported on By the Parent Holding
       Company or Control Person.

       1. Capital Guardian Trust Company (CGTC)

       2. Capital International Limited (CIL)

       3. Capital International S.A. (CISA)

       4. Capital International Research and Management, Inc. dba
          Capital International, Inc. (CII)

Item 8     Identification and Classification of Members of the Group:
       N/A

Item 9     Notice of Dissolution of Group:  N/A

Item 10     Certification


CUSIP: 001905934                                                Page 5 of 7



       By signing below I certify that, to the best of my knowledge
       and belief, the securities referred to above were not acquired
       and are not held for the purpose of or with the effect of
       changing or influencing the control of the issuer of the
       securities and were not acquired and are not held in connection
       with or as a participant in any transaction having that purpose
       or effect.

     Signature

       After reasonable inquiry and to the best of my knowledge and
       belief, I certify that the information set forth in this
       statement is true, complete and correct.


        Date:          February 11, 2003

        Signature:     *David I. Fisher
        Name/Title:    David I. Fisher, Chairman
                       Capital Group International, Inc.

        Date:          February 11, 2003

        Signature:     *David I. Fisher
        Name/Title:    David I. Fisher, Chairman
                       Capital Guardian Trust Company



        *By    /s/ Michael J. Downer
               Michael J. Downer
               Attorney-in-fact

               Signed pursuant to a Power of Attorney dated January 30,
               2003 included as an Exhibit to Schedule 13G filed with
               the Securities and Exchange Commission by Capital Group
               International, Inc. on February 10, 2003 with respect to
               Acclaim Entertainment Inc.


















CUSIP: 001905934                                                Page 6 of 7


                               AGREEMENT

                            Los Angeles, CA
                           February 11, 2003

  Capital Group International, Inc. ("CGII") and Capital Guardian
Trust Company ("CGTC") hereby agree to file a joint statement on
Schedule 13G under the Securities Exchange Act of 1934 (the "Act") in
connection with their beneficial ownership of Ordinary Shares issued by
ASM Lithography Holding NV.

  CGII and CGTC state that they are each entitled to individually use
Schedule 13G pursuant to Rule 13d-1(c) of the Act.

  CGII and CGTC are each responsible for the timely filing of the
statement and any amendments thereto, and for the completeness and
accuracy of the information concerning each of them contained therein
but are not responsible for the completeness or accuracy of the
information concerning the others.



                 CAPITAL GROUP INTERNATIONAL, INC.

                 BY:              *David I. Fisher
                                  David I. Fisher, Chairman
                                   Capital Group International,
                                   Inc.


                 CAPITAL GUARDIAN TRUST COMPANY

                 BY:              *David I. Fisher
                                  David I. Fisher, Chairman
                                   Capital Guardian Trust Company


*By  /s/ Michael J. Downer
     Michael J. Downer
     Attorney-in-fact

     Signed pursuant to a Power of Attorney dated January 30, 2003
     included as an Exhibit to Schedule 13G filed with the Securities
     and Exchange Commission by Capital Group International, Inc. on
     February 10, 2003 with respect to Acclaim Entertainment Inc.
















CUSIP: 001905934                                                Page 7 of 7