Filed pursuant to Rule 424(b)(3)
                                                               Reg No. 333-83266


PROSPECTUS SUPPLEMENT NO. 6

(To Prospectus filed with the Securities and Exchange
Commission under cover of a Registration Statement on Form
F-3 on February 20, 2002, as supplemented and amended by
Prospectus Supplement No. 1, filed with the Securities and
Exchange Commission on May 1, 2002, Prospectus Supplement
No. 2, filed with the Securities and Exchange Commission on
May 31, 2002, Prospectus Supplement No. 3, filed with the
Securities and Exchange Commission on June 7, 2002,
Prospectus Supplement No. 4, filed with the Securities and
Exchange Commission on July 25, 2002, and Prospectus
Supplement No. 5, filed with the Securities and Exchange
Commission on September 26, 2002).

                      ASML Holding N.V.
                 30,814,576 Ordinary Shares

         This Prospectus Supplement No. 6 supplements and
amends the Prospectus relating to 30,814,576 of our ordinary
shares, issuable upon conversion of our 5.75% convertible
subordinated notes due 2006, as filed with the Securities
and Exchange Commission under cover of a Registration
Statement on Form F-3 on February 20, 2002, as supplemented
by Prospectus Supplement No. 1, filed with the Securities
and Exchange Commission on May 1, 2002, and Prospectus
Supplement No. 2, filed with the Securities and Exchange
Commission on May 31, 2002, Prospectus Supplement No. 3,
filed with the Securities and Exchange Commission on June 7,
2002, Prospectus Supplement No. 4, filed with the Securities
and Exchange Commission on July 25, 2002, and Prospectus
Supplement No. 5, filed with the Securities and Exchange
Commission on September 26, 2002.

         The table on pages 13 through 16 of the Prospectus
(as supplemented and amended) sets forth information with
respect to the selling securityholders and the respective
number of ordinary shares to be beneficially owned by each
selling securityholder upon conversion of the 5.75%
convertible subordinated notes due 2006 and that may be
offered pursuant to the Prospectus (as supplemented and
amended). This Prospectus Supplement No. 6 amends that table
by replacing the information in the table with respect to
Wachovia Securities International Ltd., including the number
of shares to be owned by it upon conversion of 5.75%
convertible surbordinated notes due 2006, with the items set
forth below.




--------------------------------------------------- ---------------------------------- -------------------------
                                                                                 
              Selling Securityholder                 Number of Ordinary Shares to be     Percentage of Total
                                                     Owned Upon Conversion of 5.75%       Amount of Ordinary
                                                     Convertible Subordinated Notes     Shares outstanding as
                                                       due 2006 and Offered Hereby       of December 31, 2001


--------------------------------------------------- ---------------------------------- -------------------------
Wachovia Securities International Ltd.                           455,519                          *
201 S. College Street
Charlotte, NC 28288
Tel: (704) 715-7667
Fax: (704) 383-3394
--------------------------------------------------- ---------------------------------- -------------------------
*Less than 1%


         The Prospectus, together with Prospectus Supplement
Nos. 1, 2, 3, 4, 5 and this Prospectus Supplement No. 6,
constitutes the Prospectus required to be delivered by
Section 5(b) of the Securities Act of 1933 with respect to
offers and sales of ordinary shares, nominal value Euro 0.02
per share, issuable upon conversion of our 5.75% convertible
subordinated notes due 2006.

         Prospective investors should carefully consider
matters discussed under the caption "Risk Factors" beginning
on page 1 of the Prospectus.

         Neither the Securities and Exchange Commission nor
any U.S. state securities regulators have approved or
disapproved of these securities or determined if this
Prospectus Supplement No. 6 is truthful or complete. Any
representation to the contrary is a criminal offense.

         The date of this Prospectus Supplement No. 6 is December 12, 2002.